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Self-assembled Titanium Calcium Oxide Nanopatterns as versatile Reactive Nanomasks for Dry Etching Lithographic Transfer with High Selectivity
Saturday, December 1, 2012 15:33
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Where size matters
Gilles Lerondel
Nanoscale , 2012, Accepted Manuscript
DOI: 10.1039/C2NR33341D, Paper
David Grosso, Marco Faustini, Glenna Drisko, Alban A. Letailleur, Rafael Salas Montiel, Cedric Boissiere, Andrea Cattoni, Anne-Marie HAGHIRI-GOSNET, Gilles Lerondel
We report the simple preparation of ultra-thin self-assembled nanoperforated titanium calcium oxide films and their use as Reactive NanoMasks for selective dry etching of silicon. The novel reactive nanomask is…
The content of this RSS Feed (c) The Royal Society of Chemistry
2012-12-01 15:22:23
Source: http://nanochemistry.blogspot.com/2012/12/self-assembled-titanium-calcium-oxide.html
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