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Edge-induced flattening in the fabrication of ultrathin freestanding crystalline silicon sheets

Friday, January 25, 2013 12:03
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Where size matters

(author unknown)

Gokul Gopalakrishnan, David A. Czaplewski, and Kyle M. McElhinny et al.

Silicon nanomembranes are suspended single-crystal sheets of silicon, tens of nanometers thick, with areas in the thousands of square micrometers. Challenges in fabrication arise from buckling due to strains of over 10−3 in the silicon-on-insulator starting material. In equilibrium, the distortion … [Appl. Phys. Lett. 102, 033113 (2013)] published Fri Jan 25, 2013.

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