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Where size matters
Gokul Gopalakrishnan, David A. Czaplewski, and Kyle M. McElhinny et al.
Silicon nanomembranes are suspended single-crystal sheets of silicon, tens of nanometers thick, with areas in the thousands of square micrometers. Challenges in fabrication arise from buckling due to strains of over 10−3 in the silicon-on-insulator starting material. In equilibrium, the distortion … [Appl. Phys. Lett. 102, 033113 (2013)] published Fri Jan 25, 2013.
2013-01-25 11:34:00
Source: http://nanochemistry.blogspot.com/2013/01/edge-induced-flattening-in-fabrication.html