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Ultrahigh-frequency surface acoustic wave generation for acoustic charge transport in silicon
Wednesday, January 9, 2013 12:52
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S. Büyükköse, B. Vratzov, and J. van der Veen et al.
We demonstrate piezo-electrical generation of ultrahigh-frequency surface acoustic waves on silicon substrates, using high-resolution UV-based nanoimprint lithography, hydrogen silsequioxane planarization, and metal lift-off. Interdigital transducers were fabricated on a ZnO layer sandwiched betwe … [Appl. Phys. Lett. 102, 013112 (2013)] published Wed Jan 09, 2013.
2013-01-09 12:05:38
Source: http://nanochemistry.blogspot.com/2013/01/ultrahigh-frequency-surface-acoustic.html
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