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Cooperation between adsorbates accounts for the activation of atomic layer deposition reactions
Wednesday, March 11, 2015 2:42
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Where size matters
Nanoscale , 2015, Accepted Manuscript
DOI: 10.1039/C5NR00900F, Paper
mahdi shirazi, Simon D. Elliott
Atomic layer deposition (ALD) is a technique for producing conformal layers of nanometre-scale thickness, used commercially in non-planar electronics and increasingly in other high-tech industries. ALD depends on self-limiting surface…
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Source: http://nanochemistry.blogspot.com/2015/03/cooperation-between-adsorbates-accounts.html
