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Fabrication of ultra-thin Silicon Nano-wire Arrays by Ion Beam-Assisted Chemical Etching

Monday, September 21, 2015 2:28
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Nanoscale, 2015, Accepted Manuscript
DOI: 10.1039/C5NR02876K, Communication
Zhiyuan Tan, Wenjia Shi, Chungang Guo, Quan Zhang, Liang Yang, Xiao-ling Wu, Guoan Cheng, Ring-ting Zheng
Uniformly dispersion of Au-Ag alloy nanoparticles underneath the surface of Si wafer is realized by Au film pre-deposition and Ag ion implantation. The Au-Ag nanoparticles are used as catalyst in…
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Source: http://nanochemistry.blogspot.com/2015/09/fabrication-of-ultra-thin-silicon-nano.html

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