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Atomic Layer Deposition of Ga2O3 Films Using Trimethylgallium and Ozone
Thursday, November 1, 2012 18:41
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David J. Comstock and Jeffrey W. Elam
Chemistry of Materials
DOI: 10.1021/cm300712x
2012-11-01 18:02:27
Source: http://nanochemistry.blogspot.com/2012/11/atomic-layer-deposition-of-ga2o3-films.html
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