| Story Views | |
| Now: | |
| Last Hour: | |
| Last 24 Hours: | |
| Total: | |
Investigation of plasma-doped fin structure and characterization of dopants by atom probe tomography
Wednesday, November 21, 2012 20:41
% of readers think this story is Fact. Add your two cents.
Where size matters
(author unknown)
B. H. Kim, S. M. Park, and S. W. Park et al.
As and P dopants in a plasma-doped Si-based fin structure were analyzed using atom probe tomography. The distributions and concentrations of As and P atoms in various regions of the fin structure and the oxidation levels for different dopants were determined. Most dopants were segregated at the fi … [Appl. Phys. Lett. 101, 213113 (2012)] published Wed Nov 21, 2012.
2012-11-21 20:08:10
Source: http://nanochemistry.blogspot.com/2012/11/investigation-of-plasma-doped-fin.html
Source:
