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Self-assembled titanium calcium oxide nanopatterns as versatile reactive nanomasks for dry etching lithographic transfer with high selectivity
Thursday, December 20, 2012 16:30
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Where size matters
David Grosso
Nanoscale , 2013, Advance Article
DOI: 10.1039/C2NR33341D, Paper
Marco Faustini, Glenna L. Drisko, Alban A. Letailleur, Rafael Salas Montiel, Cedric Boissiere, Andrea Cattoni, Anne Marie Haghiri-Gosnet, Gilles Lerondel, David Grosso
Novel sol-gel derived reactive nanomasks were used for dry etching of silicon allowing the formation of nanowells or nanopillars.
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2012-12-20 09:56:38
Source: http://nanochemistry.blogspot.com/2012/12/self-assembled-titanium-calcium-oxide_20.html
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