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Aixtron announced that China’s Zhejiang University has ordered an AIXTRON BM 2-inch R&D system. The system (which was ordered in Q2 2012 and which will be delivered in Q4 2012) will be used for advance CNT and graphene research.
The BM R&D system features a high performance, fast response heater (1000° C/minute ramp rate) which enables complex process steps at different temperatures to be reproducibly implemented, such as catalyst pre-annealing, growth and post annealing.
2012-12-13 07:23:44